Used Japanese Optorun OTFC-1550 RF Source 23-inch Vacuum Coating Machine with Installation Included

The OTFC-1550 23-inch RF Sputtering Vacuum Coating Machine by Guangchi is a high-end equipment designed for optical thin film manufacturing. Its technical parameters, application areas, and distribution details are as follows:

 ‌I. Core Configuration‌ ‌Vacuum System‌ The vacuum chamber measures Ф1550×1800mm and is made of SUS304 stainless steel, offering high corrosion resistance and sealing performance. The workpiece holder has a diameter of Ф1400mm with an adjustable rotation speed of 10-30rpm, supporting planetary or bell jar operation modes. The exhaust system consists of a mechanical pump (Model 275/SV630) + Roots pump (Edwards brand) + diffusion pump + cryogenic condenser (POLYCOLD), achieving an ultimate vacuum of ≤7.0×10⁻⁵Pa and reaching working vacuum in just 15 minutes. ‌RF Ion Source‌ Equipped with a 23-inch RF ion source (RF ion source), it enhances film density and wear resistance (verified through 40,000 friction tests) via high-density ion current, making it suitable for AR/AF films and high-reflection film preparation. ‌Evaporation System‌ Features dual electron guns (Model 16F/16P) and a 12-pocket ring crucible, supporting complex coating structures of over 100 layers, compatible with thermal resistance evaporation and electron beam evaporation processes. ‌Monitoring System‌ Integrated with the HOM2R-VIS350A optical thickness monitor (wavelength range 350-1100nm), paired with the XTC/3 control system and a 6-point crystal sensor, achieving nanometer-level coating precision.

 ‌II. Application Areas‌ ‌Optical Devices‌: Preparation of multilayer optical thin films such as infrared cut-off filters and dichroic filters. ‌Electronics and Displays‌: Mass production of anti-smudge films (AS films) and anti-reflection films (AF+AS films) for smartphone touchscreens. ‌Precision Coating‌: Supports complex coating structures like high-reflection films and dielectric films on ceramic, metal substrates, and plastic materials.

 ‌III. Equipment Parameters‌ ‌Power Requirements‌: 3-phase 200V, 50/60Hz, power approximately 80-120KVA. ‌Energy Consumption Configuration‌: Water flow rate ≥180 liters/min, air pressure ≥0.5MPa. ‌Dimensions and Weight‌: Equipment dimensions about 6300×9000×4000mm, weight 11000-12000kg. ‌IV. Technical Advantages‌ ‌Wear Resistance‌: Verified through 40,000 friction tests, the film exhibits excellent adhesion and durability. ‌Automated Control‌: Supports fully automatic evaporation processes, including online resistance probe detection, enhancing mass production stability.