White Light Interference 3D Microscope Measuring Instrument

Zhongtu Instrument's SuperViewW White Light Interference 3D Microscope Measuring Instrument offers high measurement accuracy, user-friendly operation, comprehensive functionality, and a wide range of measurable parameters. It ensures short measurement times for individual precision components, guaranteeing high-throughput inspection.

The SuperViewW White Light Interference 3D Microscope Measuring Instrument is used for sub-nanometer level measurements of various precision components and material surfaces. It is applicable in semiconductor manufacturing and packaging process inspection, 3C electronic glass screens and their precision accessories, optical processing, micro-nano materials and manufacturing, automotive parts, MEMS devices, and other ultra-precision machining industries, as well as in aerospace and scientific research institutions. It can measure surfaces ranging from ultra-smooth to rough, and from low to high reflectivity, evaluating parameters such as roughness, flatness, micro-geometric profiles, and curvature of workpieces from nanometers to micrometers. Its special light source mode allows it to be widely used for measuring surfaces of various fine components, from smooth to rough.

Product Features

1) Sample measurement capability: A single scanning mode meets the measurement needs of all types of sample surfaces, from ultra-smooth to rough, mirror-like to fully transparent or black materials;

2) Single-area automatic measurement: When switching measurement points on a single flat sample or batch samples, automatic fringe search and scanning functions can be activated with one click;

3) Multi-area automatic measurement: Multiple measurement points can be set in square or circular arrays, enabling automatic fringe search and scanning with one click;

4) Automatic stitching measurement: Supports automatic stitching measurement in square, circular, ring, and spiral forms. Combined with image navigation, it allows custom measurement areas and supports seamless stitching of thousands of images;

5) Programmed measurement function: Features a software module that integrates measurement and analysis operations. Data processing and analysis steps can be pre-configured, enabling one-click measurement when combined with automatic single measurement;

6) Data processing function: Provides four major modules for data processing: position adjustment, denoising, filtering, and extraction;

7) Data analysis function: Offers five major analysis functions: roughness analysis, geometric profile analysis, structural analysis, frequency analysis, and functional analysis;

8) Batch analysis function: Custom data processing and analysis templates can be created based on required parameters, enabling one-click batch analysis for similar parameters;

9) Data report export: Supports exporting data reports in Word, Excel, and PDF formats, including images and numerical results;

10) Troubleshooting function: Equipped with a diagnostic module that can save interference fringe images during scanning;

11) Convenient operation: The device comes with a joystick, supporting all positional axis operations, speed adjustment, light source brightness adjustment, and emergency stop;

12) Environmental noise evaluation: Features environmental noise evaluation with 0.1 nm resolution, quantitatively detecting the noise amplitude and frequency caused by external environmental interference, providing a quantitative basis for device debugging and troubleshooting;

13) Air-floating vibration isolation: Uses an air-floating vibration isolation base to effectively isolate ground-transmitted vibration noise, ensuring high-precision measurement data;

14) Light source safety: The light source includes an automatic shut-off function during unattended operation. If no mouse movement is detected for an extended period, the light source dims and turns off automatically to prevent overheating damage and extend its lifespan;

15) Lens safety: Dual collision protection includes software ZSTOP collision protection, which sets the current position as the lower displacement limit with an alarm to prevent further downward movement. The device is also equipped with a pressure sensor and a spring mechanism design at the lens, ensuring elastic retraction upon collision, entering an emergency stop state, significantly reducing impact force, effectively protecting the lens and scanning axis, and eliminating safety risks from human operation.

Application Field Images

The SuperViewW White Light Interference 3D Microscope Measuring Instrument measures and analyzes surface topography features such as roughness, waviness, surface profile, surface defects, wear, corrosion, pore gaps, step height, bending deformation, and machining conditions of various products, components, and materials.

Automatic Stitching Measurement Function

To meet the dual requirements of high precision and large scanning range for ultra-smooth concave arc scanning of finished samples, Zhongtu Instrument's SuperView W1 employs a composite EPSI reconstruction algorithm, overcoming the limitations of traditional phase-shifting method PSI (small scanning range) and vertical scanning interferometry VSI (low precision). Under the automatic stitching module, simply defining the start and end points enables automatic scanning and reconstruction of ultra-smooth surface areas without any overlapping gaps. Please note: Due to market developments and product development needs, the content in this product material may be updated or modified at any time without prior notice. We appreciate your understanding.

If you have any questions or need more detailed information, please feel free to contact Zhongtu Instrument for consultation.