Micro-nano 3D Optical Profiler

Zhongtu Instrument's SuperView W1 Micro-Nano 3D Optical Profiler, based on white light interferometry technology and combined with precision Z-axis scanning modules, 3D modeling algorithms, etc., is widely used in ultra-precision machining industries such as semiconductor manufacturing and packaging process inspection, 3C electronic glass screens and their precision components, optical processing, micro-nano materials and manufacturing, automotive parts, MEMS devices, as well as in fields like aerospace and scientific research institutions. It can measure various surfaces from ultra-smooth to rough, and from low to high reflectivity, including roughness, flatness, micro-geometric profiles, curvature, etc., of workpieces ranging from nanometers to micrometers.

Product Features

1) Sample measurement capability: A single scanning mode can meet the measurement needs of all types of sample surfaces, from ultra-smooth to rough, mirror-like to fully transparent or black materials;

2) Single-area automatic measurement: When switching measurement points for a single flat sample or batch samples, automatic fringe search, scanning, and other functions can be achieved with one click;

3) Multi-area automatic measurement: Multiple measurement points in array forms such as square or circular can be set, enabling automatic fringe search, scanning, and other functions with one click;

4) Automatic stitching measurement: Supports automatic stitching measurement in square, circular, ring, and spiral forms. Combined with image navigation, custom measurement areas are supported, enabling seamless stitching of thousands of images;

5) Programmed measurement function: Supports software modules for measurement and analysis in the same interface. Data processing and analysis steps can be pre-configured, and combined with automatic single measurement function to achieve one-click measurement;

6) Data processing function: Provides data processing functions including position adjustment, denoising, filtering, and extraction;

7) Data analysis function: Offers five major analysis functions: roughness analysis, geometric profile analysis, structural analysis, frequency analysis, and functional analysis;

8) Batch analysis function: Custom data processing and analysis templates can be created based on required parameters, enabling one-click batch analysis for similar parameters;

9) Data report export: Supports data report export in Word, Excel, and PDF formats, including images and numerical results;

10) Troubleshooting function: Equipped with a diagnostic module that can save interference fringe images during scanning;

11) Convenient operation function: The device is equipped with a joystick, supporting all position axis operations, speed adjustment, light source brightness adjustment, emergency stop, etc.;

12) Environmental noise evaluation: Features environmental noise evaluation with 0.1 nm resolution, quantitatively detecting the noise amplitude and frequency caused by external environmental interference, providing quantitative basis for equipment debugging and troubleshooting;

13) Air-floating vibration isolation function: Uses an air-floating vibration isolation base to effectively isolate ground-transmitted vibration noise, ensuring high-precision measurement data;

14) Light source safety function: The light source is equipped with an automatic shut-off function during unattended operation. When no mouse movement is detected for a long time, the light source will automatically dim and turn off to prevent overheating damage and extend its service life;

15) Lens safety function: Dual collision protection includes software ZSTOP collision protection, which sets the current position as the lower limit to prevent further downward movement and triggers an alarm. The device is also equipped with pressure sensors and a spring structure design at the lens, ensuring elastic retraction upon collision, entering an emergency stop state, significantly reducing impact force, effectively protecting the lens and scanning axis, and eliminating safety risks from manual operation.

The SuperView W1 Micro-Nano 3D Optical Profiler offers high measurement accuracy, convenient operation, comprehensive functions, and a wide range of measurable parameters. The process of measuring a single fine component is short, ensuring high throughput inspection. The special light source mode of the white light interferometer makes it widely applicable for measuring surfaces of various fine components, from smooth to rough.

Application Field Images

The SuperView W1 Micro-Nano 3D Optical Profiler measures and analyzes surface topography characteristics such as roughness, waviness, surface profile, surface defects, wear, corrosion, pore gaps, step height, bending deformation, and machining conditions of various products, components, and materials.

To meet the dual requirements of high precision and large scanning range for scanning ultra-smooth concave curved surfaces of completed samples, Zhongtu Instrument's SuperView W1 uses a composite EPSI reconstruction algorithm, overcoming the limitations of traditional phase-shifting method PSI (small scanning range) and vertical scanning interferometry VSI (low precision). Under the automatic stitching module, simply define the start and end points to automatically scan and reconstruct the ultra-smooth surface area without any overlapping gaps.

Partial Technical Specifications

Please note: Due to market development and product development needs, the content in this product documentation may be updated or modified at any time based on actual circumstances without prior notice. We appreciate your understanding for any inconvenience caused.

If you have any questions or need more detailed information, please feel free to contact Zhongtu Instrument for consultation.