White Light Interference 3D Surface Topography Measuring Instrument

Zhongtu Instrument SuperViewWWhite Light Interference 3D Surface Profiler is based on the principle of white light interference and is widely applicable for measuring surfaces of various precision components, from smooth to rough. It offers high measurement accuracy, ease of operation, comprehensive functionality, and a wide range of measurement parameters. The process of measuring a single precision component is short, ensuring high-throughput detection.

SuperViewWWhite Light Interference 3D Surface Profiler can be widely used in ultra-precision machining industries such as semiconductor manufacturing and packaging process inspection, 3C electronic glass screens and their precision components, optical processing, micro-nano materials and manufacturing, automotive parts, MEMS devices, as well as in aerospace, research institutions, and other fields. It can measure surfaces of various objects from ultra-smooth to rough, and from low to high reflectivity, including roughness, flatness, micro-geometric profiles, curvature, and other parameters of workpieces ranging from nanometers to micrometers.

Product Features

1) Sample measurement capability: A single scanning mode can meet the measurement needs of all types of sample surfaces, from ultra-smooth to rough, mirror-like to fully transparent or black materials;

2) Single-area automatic measurement: When switching measurement points for a single flat sample or batch samples, automatic fringe search, scanning, and other functions can be achieved with one click;

3) Multi-area automatic measurement: Multiple measurement points in square or circular array forms can be set, enabling automatic fringe search, scanning, and other functions with one click;

4) Automatic stitching measurement: Supports automatic stitching measurement in square, circular, ring, and spiral forms. Combined with image navigation, custom measurement areas can be defined, supporting seamless stitching of thousands of images;

5) Programmed measurement function: Supports software modules for measurement and analysis within the same interface. Data processing and analysis steps can be pre-configured, enabling one-click measurement when combined with automatic single measurement;

6) Data processing function: Provides data processing capabilities across four modules: position adjustment, denoising, filtering, and extraction;

7) Data analysis function: Offers five major analysis functions: roughness analysis, geometric profile analysis, structural analysis, frequency analysis, and functional analysis;

8) Batch analysis function: Custom data processing and analysis templates can be created based on required parameters, enabling one-click batch analysis for similar parameters;

9) Data report export: Supports data report export in Word, Excel, and PDF formats, including images and numerical results;

10) Troubleshooting function: Equipped with a diagnostic module that can save interference fringe images during scanning;

11) Convenient operation: The device is equipped with a joystick, supporting all positional axis operations, speed adjustment, light source brightness adjustment, emergency stop, and more;

12) Environmental noise evaluation: Features 0.1nm resolution environmental noise evaluation, quantitatively detecting the noise amplitude and frequency caused by external environmental interference, providing a quantitative basis for device debugging and troubleshooting;

13) Air-floating vibration isolation: Uses an air-floating vibration isolation base to effectively isolate ground-transmitted vibration noise, ensuring high-precision measurement data;

14) Light source safety: The light source is equipped with an automatic shut-off function during unattended operation. If no mouse movement is detected for an extended period, the light source will automatically dim and turn off to prevent overheating damage and extend its lifespan;

15) Lens safety: Dual collision protection includes software ZSTOP collision protection, which sets the current position as the lower displacement limit with an alarm sound, and a pressure sensor with spring structure design at the lens to ensure elastic retraction upon collision, entering an emergency stop state to significantly reduce impact force, effectively protecting the lens and scanning axis, and eliminating safety risks from manual operation.

Application Field Images

SuperViewWWhite Light Interference 3D Surface Profiler measures and analyzes surface topography features such as roughness, waviness, surface profile, surface defects, wear, corrosion, pore gaps, step height, bending deformation, and machining conditions of various products, components, and materials.

To meet the dual requirements of high precision and large scanning range for ultra-smooth concave surface scanning of completed samples, Zhongtu Instrument's SuperView W1 uses a composite EPSI reconstruction algorithm, overcoming the limitations of traditional phase-shifting method PSI (small scanning range) and vertical scanning interferometry VSI (low accuracy). Under the automatic stitching module, simply define the start and end points to automatically scan and reconstruct ultra-smooth surface areas without any overlapping gaps.

Partial Technical Specifications

Please note: Due to market development and product improvement needs, the content in this product documentation may be updated or modified at any time without prior notice. We appreciate your understanding.

If you have any questions or need more detailed information, please feel free to contact Zhongtu Instrument for consultation.