VT6000 Confocal Scanning Microscope

VT6000 Confocal Scanning Microscope is a microscopic 3D measurement instrument launched by China Instrument, capable of reconstructing the three-dimensional morphology of the microstructure of solar cells. It offers high measurement accuracy, full automation, rapid measurement, and convenient data processing.

VT6000 Confocal Scanning Microscope is an optical inspection instrument for surface defects on solar panels. Based on confocal technology, combined with precision Z-axis scanning modules and 3D modeling algorithms, it is used for micro-nano level measurements of various precision devices and material surfaces.

Product Features
1) The equipment can characterize the contour dimensions and roughness of microstructures;
2) It features automatic stitching, enabling rapid measurement of large areas through stitching;
3) It includes integrated measurement and analysis software with pre-set configuration parameters. The software automatically collects measurement data and provides data report export functions, facilitating rapid batch measurements;
4) The equipment offers data processing functions across four modules: position adjustment, correction, filtering, and extraction;
5) It includes five analytical functions: roughness analysis, geometric profile analysis, structural analysis, frequency analysis, and functional analysis;
6) The device supports auxiliary analysis functions such as one-click analysis and multi-file analysis, enabling rapid analysis of batch data files;

In the solar cell manufacturing process, the aspect ratio of the grid lines determines the shading loss and conductivity of the panels, directly impacting the performance of solar cells. The confocal microscope can quickly inspect grid lines. The software automatically measures grid lines within the field of view, performs multi-section analysis on the scanned 3D contours, and calculates the height and width dimensions of each grid line section.


Additionally, in the solar cell manufacturing process, texturing is a key core process. The quality of the pyramid structures affects anti-reflection and light-trapping effects, which are critical determinants of photoelectric conversion efficiency. The confocal microscope offers nanometer-level vertical resolution, enabling 3D morphological reconstruction of samples with low surface reflectivity and complex topography, such as textured solar cell surfaces. Dedicated analysis modules automatically extract information such as the volume and surface area of each pyramid on the textured surface, calculating the number of pyramids per unit area and the proportion of pyramids of different sizes.

The confocal microscope is a high-performance inspection device that serves the needs of solar industry laboratories and production processes. It provides multi-scale inspection capabilities from 2D to 3D and will play an increasingly important role in solar cell processing.

VT6000 Confocal Scanning Microscope is widely used in ultra-precision processing industries such as semiconductor manufacturing and packaging process inspection, 3C electronic glass screens and their precision components, optical processing, micro-nano material manufacturing, automotive parts, and MEMS devices, as well as in fields like aerospace and scientific research institutions. It measures and analyzes surface morphology characteristics such as contour profiles, surface defects, wear, corrosion, flatness, roughness, waviness, pore gaps, step height, bending deformation, and processing conditions of various products, components, and materials.