Machine Tool Inspection Laser Interferometer

SJ6000Machine Tool Inspection Laser Interferometer can detect the linear positioning accuracy, repeat positioning accuracy, and other parameters such as pitch angle, yaw angle, straightness, and perpendicularity of the guide rails in precision motion equipment like CNC machine tools and coordinate measuring machines. It features dynamic measurement and analysis capabilities, including displacement analysis, velocity analysis, acceleration analysis, amplitude and frequency analysis, enabling vibration analysis, dynamic characteristic analysis of screw guides, and response characteristic analysis of drive systems. Built-in with 13 standards, including GB, ISO, British, American, German, Japanese, and other domestic and international common standards. It can analyze and process data according to various machine tool standards and print corresponding graphs and data reports.

The high directionality, high coherence, and high monochromaticity of lasers give them advantages that ordinary light sources lack. With laser interferometry as the core, the SJ6000Machine Tool Inspection Laser Interferometer achieves nanometer-level resolution in machine tool accuracy testing. The adopted dual-longitudinal-mode thermal frequency stabilization technology enables high-precision, long-term stable laser frequency output. The interferometer and main unit are designed separately, avoiding thermal effects on the interferometer and ensuring stable and reliable interferometric light paths.

Measurement Functions

(1) Capable of high-precision measurement of geometric parameters such as linear displacement, angle, straightness, perpendicularity, parallelism, flatness, and rotary axis;

(2) Can detect the linear positioning accuracy, repeat positioning accuracy, and other parameters such as pitch angle, yaw angle, straightness, and perpendicularity of the guide rails in precision motion equipment like CNC machine tools and coordinate measuring machines;

(3) Enables measurement and calibration of machine tool rotary axes;

(4) Automatically generates error compensation tables based on user-defined compensation methods, providing a basis for equipment error correction;

(5) Features dynamic measurement and analysis capabilities, including displacement analysis, velocity analysis, acceleration analysis, amplitude and frequency analysis, enabling vibration analysis, dynamic characteristic analysis of screw guides, and response characteristic analysis of drive systems;

(6) SJ6000Machine Tool Inspection Laser Interferometer supports manual or automatic environmental compensation.

Technical Specifications

Main Unit

Frequency Stabilization Accuracy: 0.05 ppm

Dynamic Acquisition Frequency: 50 kHz

Warm-up Time: ≤ 6 minutes

Operating Temperature Range: (0~40)°C

Storage Temperature Range: (-20~70)°C

Environmental Humidity: (0~95)% RH

Environmental Compensation Unit

Air Temperature Sensor: ±0.1°C (0~40)°C, Resolution 0.01°C

Material Temperature Sensor: ±0.1°C (0~55)°C, Resolution 0.01°C

Air Humidity Sensor: ±6% RH (0~95)% RH

Atmospheric Pressure Sensor: ±0.1 kPa (65~115) kPa