White Light Interferometry Optical 3D Profilometer

China Instrument SuperViewW White Light Interference Optical 3D Profiler is based on the principle of white light interference technology, combined with a precision Z-axis scanning module and 3D modeling algorithms, to perform non-contact scanning of device surfaces and construct 3D surface images. It offers high measurement accuracy, ease of operation, comprehensive functionality, and a wide range of measurable parameters. The process of measuring a single fine device is short, ensuring high-throughput detection.

The unique light source mode of the white light interferometer makes it widely applicable for measuring surfaces of various fine devices, from smooth to rough.

Product Features

1. Interference Objective Lens

Lenses with different magnifications adapt to samples with surface types ranging from ultra-smooth to rough.

2. Dual-Channel Air Flotation Vibration Isolation System

A dual-channel air flotation vibration isolation system, directly inflated by an external air source and pressurization device, effectively isolates ground-transmitted vibration noise.

3. Acoustic Vibration Isolation Protection

The instrument housing and internal motion mechanism adopt a separated design, effectively isolating the transmission of acoustic vibrations.

4. Horizontal Adjustment Device

Tilt adjustment knobs adjust fringe width, improving the reconstruction accuracy of 3D images.

5. Portable Joystick

Designed with ergonomics, it integrates automatic control of XYZ three-axis displacement and speed, light source brightness, and is equipped with an emergency stop button.

6. Vacuum Adsorption Stage

A vacuum adsorption stage specifically designed for semiconductor wafers ensures that samples are not affected by weak air currents during measurement.

7. 3D Reconstruction Algorithm

Automatically filters out surface noise of samples. With the support of the hardware system, measurement accuracy can reach the sub-nanometer level.

Self-Developed 3D Microscopic Measurement Software Platform Xtremevision Pro

Xtremevision Pro

A fully self-developed second-generation microscopic 3D measurement software platform that integrates four major functional modules: image scanning, 3D analysis, image measurement, and automated measurement. It is compatible with all 3D instrument models in China Instrument's W series, VT series, and WT series, automatically identifying the model type. For dual-function models, it can automatically switch scanning modes between white light interference and confocal microscopy.

Xtremevision Pro incorporates China Instrument's successful experience in the field of image flash measurement, reconstructing microscopic image measurement functions. It enables direct measurement and automatic matching measurement of parameters such as distances, angles, and radii between points and lines of microscopic planar contour dimensions.

Automatic Stitching Function

SuperViewW White Light Interference Optical 3D Profiler supports automatic stitching measurements in square, circular, ring, and spiral forms. Combined with the image navigation function, it allows custom measurement areas and supports seamless stitching of thousands of images.

Application Areas

SuperViewW White Light Interference Optical 3D Profiler measures and analyzes surface topography features such as roughness, waviness, surface profile, surface defects, wear, corrosion, pore gaps, step height, bending deformation, and machining conditions of various products, components, and materials.

Partial Technical Specifications

Please note: Due to market development and product development needs, the content in this product material may be updated or modified at any time according to actual circumstances without prior notice. We apologize for any inconvenience caused.

If you have any questions or need more detailed information, please feel free to contact China Instrument for consultation.