China Optical Profilometer

Zhongtu Optical Profiler SuperView W1 utilizes white light interferometry technology, combined with a precision Z-axis scanning module and 3D modeling algorithms, to perform non-contact scanning of device surfaces and construct 3D images. Through the system software, the 3D images of the device surface are processed and analyzed to obtain 2D and 3D parameters that reflect the surface quality, thereby achieving 3D measurement of the device surface topography. It is primarily used to measure and analyze surface morphology characteristics such as flatness, roughness, waviness, surface profile, surface defects, wear, corrosion, pore gaps, step height, bending deformation, and machining conditions of various products, components, and materials.

Structural Features

4. Precision Control Handle

An integrated control handle with displacement adjustment functions in the X, Y, and Z directions, enabling quick completion of pre-measurement tasks such as stage translation, Z-axis focusing, and fringe searching.

2. Dual Anti-Collision Protection Measures

In addition to the primary software ZSTOP setting for Z-axis displacement lower limit protection, a mechanical-electronic sensor is designed on the Z-axis. When the lens touches the sample surface, the instrument automatically enters an emergency stop state to protect the equipment and reduce operational risks.

3. Dual-Channel Air Flotation Vibration Isolation System

Zhongtu Optical Profiler can be connected to a stable air source at the customer's site or to a standard-equipped silent air compressor, allowing stable operation even without an external air source.

Integrated Measurement and Analysis Software

1) Measurement and analysis operations are performed on the same interface without switching, with automatic data statistics, enabling fast batch measurement functionality;

2) Visual window for real-time observation of the scanning process;

3) Automated measurement function combined with customizable analysis templates, allowing automatic completion of multi-area measurement and analysis processes;

4) Comprehensive five functional modules: geometric analysis, roughness analysis, structural analysis, frequency analysis, and functional analysis;

5) One-click analysis, multi-file analysis, free combination of analysis items saved as analysis templates, one-click analysis for batch samples, and data analysis and statistical chart functionality;

6) Capable of measuring over 300 types of 2D and 3D parameters based on standards such as ISO, ASME, EUR, and GBT.

Zhongtu Optical Profiler can measure up to 12mm and even smaller dimensions. The standard travel range of the XY stage is 140*110mm, with local displacement accuracy reaching sub-micron levels. The lateral resolution of the lens can reach 0.4μm, and the Z-axis scanning motor can scan a range of 10mm with a vertical resolution of up to 0.1nm, enabling measurement of very small-sized devices.